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采用原位电阻法对TFA-MOD法高温热处理阶段YBCO薄膜生长速率进行了研究。实验结果和分析表明原位电阻测量法是一种估算YBCO层生长速率的有效方法,不同条件下的测量结果表明薄膜生长速率随管式炉内的温度、水分压、气体流量的上升而明显增加,但随薄膜面积的增加而减小。实验结果为进一步探索和优化热处理过程提供了重要的基础。
The in-situ resistance method was used to study the growth rate of YBCO film during the high-temperature heat treatment of TFA-MOD. The experimental results and analysis show that in situ resistance measurement is an effective method to estimate the growth rate of YBCO layer. The measurement results under different conditions show that the film growth rate increases obviously with the increase of temperature, water pressure and gas flow in tube furnace , But decreases with the increase of membrane area. The experimental results provide an important foundation for further exploration and optimization of the heat treatment process.