瞄准国际水平 ,积极开展技术创新是上海硅材料厂发展半导体硅材料的思路和原则。去年 ,上海硅材料厂将近年自行开发成功的硅片背面软损伤技术、降低硅片体内金属杂质退火清洗技术和降低硅片翘曲度技术成功应用于Φ15 0ｍｍ腐蚀硅片生产。这一年 ,Φ15 0ｍｍ腐蚀硅片产量达 770 Focusing on the international level, active technological innovation is the thinking and principle for the development of semiconductor silicon materials at Shanghai Silicon Materials Plant. Last year, Shanghai Silicon Material Factory succeeded in applying the soft damage technology on the back of silicon wafers developed in recent years, the technology of reducing the annealing and cleaning of metal impurities in silicon wafers, and the technology of reducing warpage of silicon wafers to successfully apply to the production of Φ150mm silicon wafers. This year, Φ15 0mm silicon wafer production reached 770