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采用溶胶-凝胶技术,使用旋涂方法在K9玻璃和单晶硅片上制备各种光学薄膜,并用紫外光源作为高能光子源辐照溶胶-凝胶光学薄膜。使用扫描电镜(SEM)、原子力显微镜(AFM)、椭偏仪、铅笔硬度仪等测量和分析薄膜的特性。用输出波长1 064 nm、脉宽15 ns电光调Q激光系统测试薄膜的激光损伤阈值。结果表明,紫外光辐照可提高薄膜折射率和机械性能。采用紫外预处理还能将节瘤缺陷转换成孔洞缺陷,从而有效提高薄膜的激光损伤阈值,其中,单层ZrO2薄膜的激光损伤阈值达到50.6 J/cm2(1 064 nm,1 ns)。与当前流行的激光预处理技术相比,紫外预处理的设备简单、易于操作。溶胶-凝胶多层膜经紫外光处理后,有效提高了多层膜膜层的均匀性。
A variety of optical films were prepared on K9 glass and monocrystalline silicon wafers using a sol-gel technique using a spin-on method and a sol-gel optical film was irradiated with a UV light source as a high energy photon source. The characteristics of the film were measured and analyzed using scanning electron microscopy (SEM), atomic force microscope (AFM), ellipsometry, pencil hardness tester and the like. The laser damage threshold of thin film was tested by the electro-optical Q-switched laser system with output wavelength of 1 064 nm and pulse width of 15 ns. The results show that the UV irradiation can improve the refractive index and mechanical properties of the film. Ultraviolet pretreatment can also convert the nodular defects into hole defects, which can effectively improve the laser damage threshold of the films. The laser damage threshold of single ZrO2 films reaches 50.6 J / cm2 (1 064 nm, 1 ns). Compared with the current laser pretreatment technology, UV pretreatment equipment is simple and easy to operate. After the sol-gel multilayer film is treated with ultraviolet light, the uniformity of the multilayer film layer is effectively improved.