通过控制溶胶 凝胶 (sol gel)工艺条件 ,利用相应条件下样品的红外光谱 ,等温表面电位衰减 ,开路热刺激放电电流谱等 ,考察了Si基多孔SiO2 薄膜驻极体体内沉积的空间电荷的储存稳定性 ,分析了各种工艺参数与薄膜驻极体性质之间的联系。实验结果表明 ,反应物中水含量对薄膜驻极体的电荷储存稳定性及陷阱分布有一定的影响 ;烧结温度和时间对电荷的储存稳定性的影响较大 By controlling the sol gel process conditions, the infrared spectra of the samples, the isothermal surface potential decay, the open circuit thermal stimulated discharge current spectrum and so on were used to investigate the space charge of Si-based porous SiO2 film deposited in the electret Storage stability, analysis of the various process parameters and the nature of the relationship between the film electret. The experimental results show that the water content of the reactants has certain influence on the charge storage stability and trap distribution of the film electret. The sintering temperature and time have a great influence on the charge storage stability