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本文采用150W连续波CO_2激光器为光源,以Fe(CO)_5,SiH_4,C_2H_4等为原料,制备出Fe/C/Si超微粒子。测定了反应火焰的瞬时温度与激光功率密度、反应压力、原料气配比等反应参数之间的关系。分别用EDTA容量法和氟硅酸钾法分析了产物中Fe,Si的百分含量,并用X射线衍射、电子衍射、透射电镜、红外光谱、激光荧光光谱等技术对超微粒子的性能进行了表征。
In this paper, 150W continuous wave CO_2 laser as light source, Fe (CO) _5, SiH_4, C_2H_4 as raw materials, prepared Fe / C / Si ultrafine particles. The relationship between the instantaneous temperature of the reaction flame and the reaction parameters such as laser power density, reaction pressure and ratio of feed gas was measured. The contents of Fe and Si in the product were analyzed by EDTA volumetric method and potassium fluosilicate method respectively. The properties of ultrafine particles were characterized by X-ray diffraction, electron diffraction, transmission electron microscopy, infrared spectroscopy and laser fluorescence spectroscopy .