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Optical emission spectroscopic measurement of trace rare gas is carried out to determinethe density of nitrogen (N) atom, in a nitrogen plasma, as a function of filling pressureand RF power applied. 2% of argon, used as an actinometer, is mixed with nitrogen. In orderto normalize the changes in the excitation cross section and electron energy distribution functionat different operational conditions, the Ar-Ⅰ emission line at 419.83 nm is used, which is of nearlythe same excitation efficiency coefficient as that of the nitrogen emission line at 493.51 nm. It isobserved that the emission intensity of the selected argon and atomic nitrogen lines increases withboth pressure and RF power, as does the nitrogen atomic density.
Optical emission spectroscopic measurement of trace rare gas is carried out to determine the density of nitrogen (N) atom, in a nitrogen plasma, as a function of filling pressure and RF power applied. 2% of argon, used as an actinometer, is mixed with nitrogen . In orderto normalize the changes in the excitation cross section and electron energy distribution functionat different operational conditions, the Ar-I emission line at 419.83 nm is used, which is the nearly the same excitation efficiency coefficient as that of the nitrogen emission line at 493.51 nm It isobserved that the emission intensity of the selected argon and atomic nitrogen lines increases withboth pressure and RF power, as does the nitrogen atomic density.