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采用表面微细加工技术制作了铁电微型传感器和执行器。其技术特点是将铁电薄膜制备和加工工艺与半导体集成电路工艺相结合。其技术难点有：平面化、多晶硅的内应力控制，悬空结构与基片粘连及各层薄膜制备工艺间的兼容性等。本文提出了解决方法。
The use of surface micro-fabrication technology made ferroelectric micro-sensors and actuators. Its technical feature is the combination of ferroelectric thin film preparation and processing technology and semiconductor integrated circuit technology. The technical difficulties are: planarization, polysilicon internal stress control, floating structure and substrate adhesion and film compatibility between the layers of the preparation process. This article presents a solution.