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采用单点金刚石切削技术,通过合理的刀具设计、夹具设计及工艺过程设计,确定了加工工艺参数,完成了厚度几μm至几十μm的无氧铜多台阶靶的制备。通过触针式轮廓仪,台阶仪,白光干涉仪对表面轮廓及粗糙度进行了测量。结果表明:通过单点金刚石切削技术加工成形的铜多台阶靶,各台阶表面均方根粗糙度小于50 nm,工件表面轮廓平直,台阶垂直度较好。采用阿基米德原理对材料密度进行测量,加工成形后密度为(8.945±0.074)g/cm3,接近材料理论密度。
Using single-point diamond cutting technology, through the reasonable tool design, fixture design and process design, the processing parameters were determined and the preparation of oxygen-free copper multi-step targets with the thickness of several μm to several tens of μm was completed. Surface profile and roughness were measured by stylus profiler, stepper and white light interferometer. The results show that the root mean square roughness of each step surface is less than 50 nm, and the surface profile of the workpiece is straight and the verticality of the step is good. The density of the material was measured by the Archimedes’ principle. The density after processing was (8.945 ± 0.074) g / cm3, close to the theoretical density of the material.