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在机械加工中,多采用平晶干涉法、刀口尺光隙法及测微法测定小平面不平度。平晶干涉法测量小平面平面度误差,虽然符合GB1183-80定义的最小条件,但测定时较麻烦。而且这种测定一般要在计量室条件下才能进行;刀口尺光隙法测定,不同人会得出不同的结论;测微法(三点或四点法)测量效率很低,精度亦不高。当被测件外形小而复杂,就无法对被测
In machining, the use of flat-crystal interference method, knife-edge aperture Gap method and micro-micro-method to determine the unevenness of the facet. Flat crystal interference method to measure facet flatness error, although in line with the minimum conditions defined by GB1183-80, but the determination of more trouble. And this measurement is generally carried out under the conditions of the metering chamber; knife-edge aperture gap method, different people will come to different conclusions; micrometric method (three-point or four-point method) measurement efficiency is low, the accuracy is not high . When the DUT is small and complex, it can not be measured