随着过程控制技术的发展,对湿度传感器的需要也愈来愈迫切。湿度测定一般是以空气为对象,利用感湿元件吸脱大气中水蒸汽的含量多少,而导致电气特性相应变化的原理来进行的。但空气中除了水蒸汽外,还含有各种各样别的气体成分和污染物质,造成检测性能恶化引起测量误差。此外,生产过程中往往还需要测量比大气测量更为低温或高温气体的湿度,这样就对湿度传感器提出了更高的要求。 With the development of process control technology, the need for humidity sensors is also becoming more and more urgent. Humidity measurement is generally based on air as the object, the use of moisture sensing element to absorb the amount of water vapor in the atmosphere, which led to changes in the electrical characteristics of the principle to carry out. However, in addition to water vapor in the air, but also contains a variety of other gas components and pollutants, resulting in deteriorated detection performance measurement error. In addition, the production process often also need to measure the temperature than the atmospheric measurement of low temperature or high temperature gas humidity, thus placing a higher humidity sensor requirements.