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采用磁控溅射工艺在PET衬底上依次沉积了Al_2O_3和SiO_2薄膜,制备出SiO_2/Al_2O_3/PET复合膜。利用扫描电镜和透湿仪对复合膜的表面形貌和透湿性能进行表征。研究了制备Al_2O_3膜层的射频功率、氩气流量、本底真空度和溅射时间4个参数对复合膜透湿率的影响。结果表明:复合膜的透湿率随着本底真空度的升高而减小,随着射频功率、氩气流量和溅射时间的增加均呈现先减小后增大的变化趋势;4个制备参数对复合膜透湿率的影响程度由大到小依次是本底真空度、氩气流量、射频功率、溅射时间;4个制备参数的较优组合为本地真空度0.5×10~(-3)Pa,射频功率300 W,溅射时间6 min,氩气流量70 m L·min~(-1)。
Al 2 O 3 and SiO 2 films were sequentially deposited on PET substrate by magnetron sputtering to prepare SiO 2 / Al 2 O 3 / PET composite films. The surface morphology and moisture permeability of the composite membrane were characterized by scanning electron microscopy and moisture permeability tester. The effects of RF power, argon flow rate, background vacuum and sputtering time on the moisture permeability of the composite membrane were investigated. The results show that the moisture permeability of the composite membrane decreases with the increase of the background vacuum. With the increase of the RF power, the flow rate of argon gas and the sputtering time, the permeability of the composite membrane first decreases and then increases. The influence degree of the preparation parameters on the moisture permeability of the composite membrane is the background vacuum degree, the argon flow rate, the RF power and the sputtering time in descending order. The optimal combination of the 4 preparation parameters is that the local vacuum degree is 0.5 × 10 ~ ( -3) Pa, radio frequency power of 300 W, sputtering time of 6 min and argon flow rate of 70 m L · min ~ (-1).