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用透射电子显微镜（TEM）研究了衬底温度和沉积速率对气相沉积在聚乙烯醇缩甲醛（PolyvinylFormale,PVF）衬底上的Pd膜显微结构的影响，当衬底温度由高到低改变时，Pd膜结构由紧密岛向分形渐变，在233－253K时Pd股具有分形结构，用Sandbox方法测量了其分维数．在相同温度的衬底上，沉积速率不同时，其分形的图样不同．研究表明，上述分形结构是稳定的．利用有边缘扩散的DLA模型讨论了这些实验结果．
The effects of substrate temperature and deposition rate on the microstructure of Pd films vapor-deposited on polyvinyl formal (PVF) substrates were investigated by transmission electron microscopy (TEM). When the substrate temperature was changed from high to low, , The Pd film structure gradually changes from the compact island to the fractal. At 233-253 K, the Pd strands have a fractal structure, and the fractal dimension of the Pd film is measured by the Sandbox method. The same temperature of the substrate, the deposition rate is different, the fractal pattern is different. Research shows that the above fractal structure is stable. These experimental results are discussed using the DLA model with edge diffusion.