采用溶胶-凝胶法在n-Si(100)衬底上制备ZnO薄膜并从三个方面对其研究。X射线衍射结果表明,在含氧气氛中退火的ZnO薄膜为多晶六角纤锌矿结构,有明显的c轴择优结晶取向;退火时间的长短和温度的高低对结晶取向性和粒径均有较大影响,通过进一步的研究发现最佳处理温度在500℃左右。用扫描电子显微镜观察样品的表面和侧面形貌,晶体的生长比较均匀,粒径平均在70~160nm范围内,与XRD测量结果相一致。室温下ZnO胶体的光致发光谱表明,随着胶体老化时间的延长,胶体的紫外峰位发生了蓝移。室温下ZnO薄膜的光致发光谱表明,紫外部分的发光峰位在365,390nm,发光强度较强;在可见光区的发光强度相对较弱,但是还没有被氧完全抑制掉。 ZnO films were prepared on n-Si (100) substrates by sol-gel method and studied from three aspects. X-ray diffraction results show that ZnO films annealed in an oxygen-containing atmosphere have a polycrystalline hexagonal wurtzite structure with a distinct c-axis preferred crystal orientation. The length of the annealing time and the temperature have an effect on the crystal orientation and particle size Greater impact, through further research found that the best treatment temperature at about 500 ℃. Scanning electron microscope (SEM) was used to observe the surface and side morphology of the samples. The growth of the crystals was more uniform and the average particle size was in the range of 70 ~ 160 nm, which was consistent with the XRD measurement. The photoluminescence spectra of ZnO colloids at room temperature show that with the prolonging of colloidal aging time, the UV peaks of colloids are blue-shifted. The photoluminescence (PL) spectra of ZnO films at room temperature show that the luminescence peaks of the ultraviolet region are at 365 and 390 nm, and the luminescence intensity is relatively strong. The luminescence intensity in the visible region is relatively weak, but has not been completely suppressed by oxygen.