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基于变间距光栅位移传感器的基本原理,研究了高线密度变化率全息平面变间距光栅的制作方法.所作的变间距光栅已应用在变间距光栅位移传感器中,原理样机测试结果表明,系统分辨率可以达到0.05mm,相对误差可以控制在0.2%FS之内,优于设计指标.
Based on the basic principle of the variable pitch grating displacement sensor, the method of fabricating the high linear density rate holographic planar variable pitch grating is studied. The variable pitch grating has been used in the variable pitch grating displacement sensor. The principle prototype test results show that the system resolution Can reach 0.05mm, the relative error can be controlled within 0.2% FS, better than the design index.