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本文介绍了以可编程控制器SYSMAC-C200H为核心的真空控制系统,描述了控制系统的要求、组成及系统软件、硬件的设计思想和故障指示.
This article introduced the programmable logic controller SYSMAC-C200H as the core of the vacuum control system, describes the control system requirements, components and system software, hardware design ideas and fault indications.