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在总结铁电材料测量理论基础上,运用相量的概念从理论上导出了铁电薄膜的线性感应电容和漏导对测量电滞回线所产生的影响。根据铁电薄膜的特性与实测结果分析了电极和测试信号的频率对测量的影响,提出了在测试过程中对铁电薄膜制备微电极和适当提高测试信号频率的优越性。
Based on the theory of measurement of ferroelectric materials, the concept of phasor is used to theoretically deduce the influence of linear induction capacitance and leakage of ferroelectric thin film on the measurement of hysteresis loop. According to the characteristics of the ferroelectric thin film and the measured results, the influence of the frequency of the electrode and the test signal on the measurement is analyzed. The advantages of preparing the microelectrode for the ferroelectric thin film and appropriately increasing the frequency of the test signal are proposed during the test.