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本文介绍了电离式锆铝吸气剂泵对甲烷的吸气作用,用实验方法测得了泵对甲烷的抽速,测量了热钨灯丝的温度和电离电子流对抽速的的影响。并用四极分压强计对抽除甲烷后的残余气体进行了质谱分析。最后对该泵清除甲烷等有机气体分子的机理进行了一定的探讨。
In this paper, the ionization type of aluminum-zirconium-aluminum getter pump is used to get the gas of methane. The pumping speed of methane is measured by the experimental method. The influence of the temperature of hot filament and ionized electron current on pumping speed is measured. The residual gas after methane removal was analyzed by mass spectrometry with a quadrupole pressure gauge. Finally, the mechanism of removing methane and other organic gas molecules from the pump was discussed.