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研究了一种制备金属超微粒的新物理方法——溅射法.介绍了该方法的装置并阐明了其基本物理原理.通过Ag、Au超微粒的制备及其透射电子显微镜和X射线衍射仪观察与分析表明,用此法可制备纳米量级的球形金属结晶超徽粒.
A new physical method for the preparation of metal ultrafine particles-sputtering method was introduced. The device of the method was introduced and its basic physical principle was illustrated. The preparation of Ag, Au ultrafine particles and their transmission electron microscopy and X-ray diffraction Observation and analysis show that this method can be used to prepare nanometer-scale spherical metal crystal superhard particles.