采用微透镜作为输出耦合镜,与垂直腔面发射激光器(VCSEL)的p-DBR和n-DBR构成复合腔,可以获得大功率单横模激光输出,改善光束质量。在GaAs衬底上采用限制扩散湿法刻蚀技术制作出不同直径的微透镜,研究了微透镜形成的基本原理、工艺流程,通过控制腐蚀的时间和腐蚀溶液的配比度,得到了不同曲率半径的微透镜,并且对微透镜表面形貌进行了研究。 The micro-lens is used as the output coupling mirror, and the p-DBR and n-DBR of the vertical cavity surface emitting laser (VCSEL) form a composite cavity, which can obtain high power single transverse mode laser output and improve the beam quality. The micro-lenses of different diameters were fabricated on GaAs substrates by diffusion-limited wet etching technique. The basic principle and process of micro-lens formation were studied. By controlling the etching time and the ratio of etching solution, different curvature Radius of the micro-lens, and micro-lens surface morphology has been studied.