目前压电微步进马达或压电转移器可以获得很高的定位精度。压电转移器把电能直接变换成机械运动,因此它在微定位应用中有着许多优点:1)效率高;2)无转动部件,无振动;3)无磨损部件,实际上使用寿命无限;4)速度快;5)体积小;6)分辨率高;7)对环境适应性强;8)最适合于闭路系统使用。但压电转移器也有一些缺点:当膨胀到最大距离的8～15％时,存在滞后特性;在不 The current piezoelectric micro-stepping motor or piezoelectric transfer device can get a high positioning accuracy. Piezoelectric shunts transform electrical energy directly into mechanical motion and therefore have many advantages in microlocation applications: 1) high efficiency; 2) no rotating parts, no vibration; 3) no wear parts, in fact, unlimited service life; 4 ) Speed; 5) small size; 6) high resolution; 7) adaptable to the environment; 8) most suitable for closed-circuit system. However, the piezoelectric transferer also has some disadvantages: there is a hysteresis characteristic when inflated to 8 to 15% of the maximum distance;