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介绍了铌酸锂调制器在1550nm有线电视(CATV)外调制发射机中的功能及其结构,调制器集成了高频相位调制器、模拟强度调制器和无源3dB耦合器在同一芯片上。分析了CATV调制器的关键技术和解决方案,采用了新颖的非平行电极、磨凹芯片背面的结构和阻抗变换方案。设计制作的模拟强度调制器获得了优于±0.5dB平坦的响应和小于-20dB的电反射。基于工艺容差和BPM软件模拟优化设计的3dB耦合器使器件得到大于30 dB的开关消光比。
The function and structure of a lithium niobate modulator in a 1550 nm CATV external modulation transmitter are introduced. The modulator integrates a high frequency phase modulator, an analog intensity modulator and a passive 3dB coupler on the same chip. The key technologies and solutions of CATV modulator are analyzed. The novel non-parallel electrodes, the structure of the backside and the impedance transformation are adopted. The designed analog intensity modulator achieves better than ± 0.5dB flat response and less than -20dB electrical reflection. The 3dB coupler based on process tolerance and BPM software simulation optimizes the device to achieve a switching extinction ratio greater than 30 dB.