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本文采用电子回旋共振微波等离子体化学气相沉积方法 (ECR -CVD) ,以CH4和H2 为气源、Fe3 O4纳米粒子为催化剂 ,未加电场 ,在多孔硅基底上制备出大面积取向生长碳纳米管。使用扫描电子显微镜 (SEM)、透射电子显微镜 (TEM)、X射线衍射 (XRD)、X射线能量色散分析 (EDX)对样品形貌和结构进行表征。结果显示 :合成的碳纳米管为多壁碳管 ;碳纳米管直径 6 0nm～ 90nm ,长度约 8μm ;碳纳米管展现出中空管状和链状两种结构 ;碳纳米管的生长采取催化剂底端生长模式。
In this paper, electron cyclotron resonance microwave plasma chemical vapor deposition (ECR-CVD) method was used to synthesize large-area oriented carbon nanocrystals on porous silicon substrates using CH4 and H2 as the gas source and Fe3O4 nanoparticles as the catalyst without electric field. tube. The morphology and structure of the samples were characterized using scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and energy dispersive X-ray analysis (EDX) The results show that: the synthesized carbon nanotubes are multi-walled carbon nanotubes; the diameter of the carbon nanotubes is from 60 nm to 90 nm and the length is about 8 μm; the carbon nanotubes exhibit two kinds of structures: a hollow tube and a chain; the growth of the carbon nanotubes takes the bottom of the catalyst Growth pattern.