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振动是影响超精密加工质量的关键因素之一，而溜板的横向振动将通过刀架直接影响被加工工件的表面质量。为此，本文提出了溜板的振动主动控制。作动器采用自行研制的主动空气轴承作动器，以实现无摩擦接触，从而实现溜板纵向运动中的横向振动控制。控制采用模糊-PID控制，误差大时，采用模糊控制；误差小时，采用PID控制。实验结果表明，基于主动空气轴承的模糊-PID控制可以有效地减小溜板振动。
Vibration is one of the key factors that affect the ultra-precision machining quality. However, the lateral vibration of the slide plate will directly affect the surface quality of the machined workpiece through the tool holder. To this end, this paper proposed the active control of the vibration of the slide. Actuators using self-developed active air bearing actuator, in order to achieve frictionless contact, in order to achieve longitudinal longitudinal slide plate vibration control. Fuzzy control using fuzzy-PID control, the error is large, the use of fuzzy control; small error, the use of PID control. Experimental results show that fuzzy-PID control based on active air bearings can effectively reduce the vibration of the slide.