论文部分内容阅读
通信系统向高频的发展趋势使声表面波(SAW)滤波器技术面临着越来越多的挑战。利用传统材料制作SAW滤波器的中心频率很难达到GHz频段,因此探索在高声速材料基础上制作SAW滤波器成为一种必然趋势。基于高声速材料金刚石设计了IDT/ZnO/金刚石结构的薄膜SAW滤波器,设计了镜像阻抗连接IDT的结构参数,并采用ADS软件对该结构进行了建模仿真。然后,通过ZnO薄膜制备工艺和IDT电极制备工艺,获得了金刚石SAW滤波器样品。最后,采用RF探针台对所制得的样品进行了性能测试和数据分析。测试结果表明,在金刚石厚膜衬底上获得了频率超过1 GHz的SAW滤波器样品。
The trend towards high frequencies in communication systems is facing increasing challenges for SAW filter technology. It is difficult to reach the GHz frequency band by using traditional materials to make the center frequency of SAW filter. Therefore, it is an inevitable trend to make SAW filter based on high-speed material. The thin film SAW filter with IDT / ZnO / diamond structure was designed based on the sonic material diamond. The structural parameters of the IDT with mirror impedance were designed and the structure was modeled and simulated by ADS software. Then, a sample of diamond SAW filter was obtained by ZnO thin film preparation process and IDT electrode preparation process. Finally, the prepared samples were tested for performance and data analysis using an RF probe station. The test results show that SAW filter samples with frequencies in excess of 1 GHz are obtained on a diamond thick film substrate.