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在透射电镜显微分析中,制样工作是十分重要的。目前主要有两种制样手段:电化学减薄(又称双喷化学减薄)和离子减薄(又称双离子减薄)。前者速度高,但不易把握减薄的程度,因而样品报废率较高,且只适用于易化学腐蚀的金属类材质。后者,是以离子束流为减薄“工具”,凭借离子的“刻蚀”作用从两侧(或一侧)减薄样品。为了使薄化区更宽阔一些,并且减薄速度可调,没计了样品自转和样品表面可绕支架轴旋转,以改变离子束相对试样表面的入射角等功能。在IE—20型双离子减薄仪上,虽然规定以Ar作为离子源气体,但我们在实际工作中,用空气作源气体亦成功地减薄了各种材质的样品。
In TEM microscopy, sample preparation is very important. There are two main sample preparation methods: electrochemical thinning (also known as double spray chemical thinning) and ion thinning (also known as double ion thinning). The former high speed, but not easy to grasp the degree of thinning, and thus higher scrapped samples, and only for easy chemical corrosion of metal materials. The latter is based on the ion beam as a thinning “tool”, by virtue of the “etching” of ions from both sides (or one side) thinning the sample. In order to make the thinning area wider and adjustable speed of thinning, without counting the sample rotation and sample surface can be rotated about the stent axis to change the ion beam relative to the sample surface angle of incidence and other functions. In the IE-20 double ion thinning instrument, although the provisions of Ar as the ion source gas, but in practice, the use of air as a source of gas has also been successfully reduced a variety of material samples.