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本文报道了150元BCCPD线阵电荷耦合图象传感器的结构特点和工作原理;分析了反型层的杂质分布、最大沟道电势与注入剂量、氧化层厚度和栅压等之间的关系。选测了BCCPD的转移效率等性能。
This paper reports the structural characteristics and operating principle of the 150 BCCPD linear CCD. The relationship between the impurity distribution of the inversion layer, the maximum channel potential, the implantation dose, the oxide thickness and the gate voltage is analyzed. Selected BCCPD transfer efficiency and other performance.