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对CVD金刚石膜的离子束铣削、电子束加工、激光加工、化学辅助机械抛光、热化学抛光等抛光技术的加工方法与原理进行了介绍,分析了这些方法的优点和不足之处。并展望了CVD金刚石薄膜抛光技术的发展方向。
The processing methods and principles of the CVD diamond film ion beam milling, electron beam machining, laser machining, chemical auxiliary mechanical polishing, thermochemical polishing and other polishing techniques are introduced, and the advantages and disadvantages of these methods are analyzed. The development direction of CVD diamond film polishing technology is also prospected.