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为了测量毫秒脉冲激光辐照非透明材料的在线应力及应力应变演化的过程,基于光学干涉理论,针对大功率固体激光器与材料的相互作用,采用马赫-曾德尔干涉的方法,得到了材料损伤的干涉条纹。通过对干涉条纹变化的分析与处理,可以得到材料在线应力及其演化过程。基于光学干涉理论,选择单晶硅作为实验材料,建立comsol仿真模型,并在理论及仿真的基础上开展实验。实验与仿真的r(x)方向误差在11.7%~33.91%之间,z(y,z)方向误差在20.25%~31.34%之间,说明用马赫-曾德尔干涉的方法测量非透明材料的应力具有可行性。实验研究为激光与非透明材料作用过程中在线应力损伤及演变过程研究提供了一个新的方法。
In order to measure the process of on-line stress and stress-strain evolution of non-transparent materials irradiated by millisecond pulsed laser, based on the theory of optical interference, aiming at the interaction between high power solid-state laser and material, the Mach-Zehnder interference method was used to obtain the material damage Interference stripes. Through the analysis and processing of interference fringe changes, the online stress and its evolution process can be obtained. Based on optical interference theory, single crystal silicon was selected as the experimental material, and the comsol simulation model was established. Experiments were carried out on the basis of theory and simulation. The error of r (x) in the experiment and simulation is between 11.7% and 33.91%, and the error in the direction of z (y, z) is between 20.25% and 31.34%, indicating that the Mach-Zehnder interference method can measure the non-transparent material Stress is feasible. Experimental study provides a new method for studying on-line stress damage and evolution in the interaction between laser and non-transparent materials.