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大型气浮轴系相对于机械轴承具有较高的回转运动精度,主要应用于超精密测量和机械加工设备的回转主轴,以提供高精度的回转运动。大型气浮轴系回转运动精度高,但对回转误差的测量手段和方法较少,针对这一问题,采用基于圆度评定的方法对其分析,可以达到几十纳米的测量精度,满足了气浮轴系的精度要求。并且对偏心e和偏移d等参数对回转精度引起的误差进行了分析,通过数据分析发现:两种参数对气浮轴系回转精度的影响较大,偏移d对偏心e具有放大作用,所以得出:采用基于圆度评定方法的回转误差测量过程中还应该对这两项参数引入的误差进行分离,以保证对回转误差的更高精度的测量。
Large flotation shaft relative to the mechanical bearings with high rotary motion accuracy, mainly used in ultra-precision measurement and machining equipment rotary spindle to provide high-precision rotary motion. In order to solve this problem, the analysis method based on the roundness evaluation is adopted to measure the rotational error of a large air-floating shaft system, which can achieve the measurement accuracy of several tens of nanometers and satisfy the requirement of gas FOB axis accuracy requirements. And the error caused by the rotation accuracy of the eccentric e and the offset d is analyzed. The data analysis shows that the two parameters have a great influence on the rotational accuracy of the flotation shaft, the offset d has an amplification effect on the eccentric e, Therefore, it is concluded that the error introduced by the two parameters should also be separated during the measurement of the gyroscopic error based on the roundness evaluation method to ensure a more accurate measurement of the gyroscopic error.