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介绍一种新颖的全光型硅微机械流量传感器。给出该传感器结构及工作原理的理论分析，并阐述传感器样品的测试及结果。流量传感器具有带脊型波导的悬臂梁结构。悬臂梁用作器件的敏感区，而检测光束可以在脊型波导中传输。
A novel all-optical silicon micro-mechanical flow sensor is introduced. The theoretical analysis of the sensor structure and working principle is given, and the test and the result of the sensor sample are described. The flow sensor has a cantilever structure with a ridge waveguide. Cantilevers are used as the sensitive area of the device, and the detection beam can be transmitted in the ridge waveguide.