论文部分内容阅读
,Optimization and Finite Element Analysis of the Temperature Field in a Nitride MOCVD Reactor by Ind
【机 构】
：
School of Microelectronics,Xidian University,Xi’an 710071“,”Key Laboratary of Ministry of Education
【出 处】
：
中国物理快报（英文版）
【发表日期】
：
2010年7期
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