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利用脉冲激光制膜法,在多种衬底和温度条件下,系统研究了La0.5Sr0.5CoO3(LSCO)薄膜的结构和外延生长特性,在LaAlO3,SrTiO3和MgO衬底上实现了LSCO薄膜的外延生长.外延生长的薄膜具有低的电阻率和金属性导电特征.研究表明,外延生长的最佳温度范围为700—800℃,最佳衬底为LaAlO3.并着重探讨了衬底材料和淀积温度等多种因素对LSCO薄膜的生长与性能的影响及其机理.
The structure and epitaxial growth characteristics of La0.5Sr0.5CoO3 (LSCO) thin films were investigated systematically by pulsed laser deposition at various substrates and temperatures. The LSCO thin films were deposited on LaAlO3, SrTiO3 and MgO substrates Epitaxial growth. Epitaxial grown thin films have low resistivity and metallic conductive features. The results show that the best temperature range of epitaxial growth is 700-800 ℃, and the best substrate is LaAlO3. The effects of substrate materials and deposition temperature on the growth and properties of LSCO films and their mechanisms were also discussed.