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同家“863”计划项目“纳米精度激光激振测振仪”日前在中科院上海光机所通过科技部高技术中心、863计划先进制造与自动化技术领域MEMS重大专项专家组的验收。中科院上海光机所信息光学实验室王向朝课题组经过一年多的努力,采用小光斑光致激振技术和正弦相位调制测振技术,研制成功一台纳米精度激光激振测振仪样机。经华东国家计量测试中心现场检测,该样机激振光斑直径小于10μm,振幅测量重复精度小于3nm,测振振幅
“863 ” project “Nano-precision laser excitation vibrometer ” Recently in the Chinese Academy of Sciences Shanghai Optical through the Ministry of Science and Technology High-tech Center, 863 advanced manufacturing and automation technology field of MEMS major project team acceptance . After more than a year of hard work, Wang Xiangchao, the Information Optical Laboratory of Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, developed a prototype of nanometer precision laser vibration exciter by adopting the technology of small-spot photo-induced vibration and sine phase modulation vibration measurement. The East China Metrology Test Center on-site testing, the prototype excitation spot diameter less than 10μm, the amplitude measurement repeatability of less than 3nm, amplitude vibration amplitude