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针对微机电系统中常用单轴柔性铰链机构原始理论设计的复杂性 ,提出了简洁而准确的单轴柔性铰链设计计算方法。从基础理论出发推导出了柔性铰链刚度及转角设计公式 ,分析了柔性铰链设计中结构参数与性能的关系。通过一种压电驱动微动工作台设计实例分析了单轴柔性铰链机构在微机电系统中的应用。实践证明了该方法的简便、可靠与实效性
Aiming at the complexity of the original theoretical design of common uniaxial flexible hinge mechanism in MEMS, a simple and accurate design method of uniaxial flexible hinge is proposed. Based on the basic theory, the design formulas of flexural stiffness and rotational angle of flexible hinge are deduced. The relationship between structural parameters and performance in flexible hinge design is analyzed. The application of a single-axis flexible hinge mechanism in micro-electromechanical system is analyzed through a piezoelectric driven micro-motion table design example. Practice has proved that the method is simple, reliable and effective