论文部分内容阅读
引言光通信系统中数据传输率的持续提升要求能处理接近 ２００ＧＨｚＦｔ/Ｆｍａｘ的更高效能工艺技术,虽然似乎可以通过将目前ＳｉＧｅ工艺技术的垂直成形处理方法加以扩展以达到２００ＧＨｚ的最高Ｆｔ值,但是要同时得到２００ＧＨｚ的Ｆｍａｘ本文就不是件简单的工作。
Introduction The continued increase in data transmission rates in optical communication systems requires processing of higher performance processes that approach 200 GHz Ft / Fmax, although it seems that by extending the vertical forming process of the current SiGe process technology to achieve the highest Ft of 200 GHz, To get the Fmax of 200GHz at the same time this article is not a simple task.