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Research on Cavity Temperature Measurement Method of Silicon Resonant Accelerometer Based on Integra
[会议论文] 作者：Jing Zhang,Guo-Ming Xia,An-Ping Qiu,Qin Shi,You Bian,
来源：The 6th International Conference on Nanoscience and Technolo 年份：2015
In order to improve the temperature stabilities of bias for silicon resonant accelerometer(SRA),a temperature measurement method to measure Temperature in p...
Research on Cavity Temperature Measurement Method of Silicon Resonant Accelerometer Based on Integra
[会议论文] 作者：Jing Zhang,Guo-Ming Xia,An-Ping Qiu,Qin Shi,You Bian,
来源：The 6th International Conference on Nanoscience and Technolo 年份：2015
In order to improve the temperature stabilities of bias for silicon resonant accelerometer(SRA),a temperature measurement method to measure Temperature in package cavity was proposed based on chip int...
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