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,Fabrication and Characterization of ZnO-Based Film Bulk Acoustic Resonator with a High Working Freq
[期刊论文] 作者：ZHANG Ting,WANG Yu,LIU Wei-Li,CHENG Jian-Gong,SONG Zhi-Tang,FENG Song-Lin,CHAN-WONG Lai-Wa Helen,CHOY,
来源：中国物理快报（英文版） 年份：2005
We report on the fabrication and characterization of a ZnO-based film-bulk acoustic-resonance device utilizedas biosensor....
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