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Meter-Scale Plasma Production and Thin Film Deposition Process with Parallel Waveguide at 915 MHz Mi
[会议论文] 作者：T.Ishijima,Y.Takanishi,H.Endo,H.Toyoda,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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Meter-Scale Plasma Production and Thin Film Deposition Process with Parallel Waveguide at 915 MHz Mi
[会议论文] 作者：T.Ishijima,Y.Takanishi,H.Endo,H.Toyoda,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
...
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