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[期刊论文] 作者:LI Yi-Gui,YANG Chun-Sheng,LIU Jing-Quan,SUGIYAMA Susumu,
来源:中国物理快报(英文版) 年份:2011
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,Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutec
[期刊论文] 作者:LI Yi-Gui,SUN Jian,YANG Chun-Sheng,LIU Jing-Quan,SUGIYAMA Susumu,TANAKA Katsuhiko,
来源:中国物理快报(英文版) 年份:2011
A lead zirconate titanate(PZT)-Si energy harvester cantilever with PZT bulk ceramics is fabricated by eutectic bonding, polishing and dicing processes.The feasi...
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