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[期刊论文] 作者:Sung Michael,Sung James C., 来源:金刚石与磨料磨具工程 年份:2008
Diamond grits held in metal matrix(sintered or electroplated) are retained primary by mechanical locking.Because of this weak attachment,the pullouts of diamond...
[期刊论文] 作者:Hiroshi Ishizuka,Sung James C., 来源:金刚石与磨料磨具工程 年份:2008
Low stress polishing is required for the manufacture of advanced integrated circuits(IC) with node sizes of 45 nm and smaller.However,the CMP community achieved...
[期刊论文] 作者:Sung James C.,Chang Kuen-liang, 来源:金刚石与磨料磨具工程 年份:2008
Diamond grits are indispensable for sawing granite or concrete.Each year about 1 000 tons of diamond grits are consumed for such purposes.In all cases,mono crys...
[期刊论文] 作者:Liu Ping-Hsiao,Sung James C.,H, 来源:金刚石与磨料磨具工程 年份:2008
Diamond grits may be thermally weakened during the high temperature cycle of brazing.This weakening may exhibit as diamond breakage.During the dressing action,t...
[期刊论文] 作者:Song Jen-hao,Sung James C.,Cha, 来源:金刚石与磨料磨具工程 年份:2008
Diamond surface acoustic wave(SAW) has been used to boost the frequency of thin film filters made of piezoelectric materials.Many designs have been tested and w...
[期刊论文] 作者:Chen Ying-Tung,Sung James C.,K, 来源:金刚石与磨料磨具工程 年份:2008
With the relentless densification of interconnected circuitry dictated by Moore’ s Law,the CMP manufacture of such delicate wafers requires the significant red...
[期刊论文] 作者:Chou Cheng-Shiang,Sung James C.,Pai Yang-Liang,Sung Michael,, 来源:金刚石与磨料磨具工程 年份:2008
Diamond pad conditioners can determine the efficiency of CMP processes and the quality of polished wafers.The polishing rate of a wafer is dependent on the ampl...
[期刊论文] 作者:Hiroshi Ishizuka,Sung James C.,Marehito Aoki,Haedo Jeong,Sung Michael,, 来源:金刚石与磨料磨具工程 年份:2008
Low stress polishing is required for the manufacture of advanced integrated circuits(IC) with node sizes of 45 nm and smaller.However,the CMP community achieved...
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