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[期刊论文] 作者:Wen Xiaolong,Peng Chunrong,Fan, 来源:电子科学学刊:英文版 年份:2014
This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined...
[期刊论文] 作者:WEN Xiaolong,PENG Chunrong,FANG Dongming,YANG Pengfei,REN Tianling,XIA Shanhong,, 来源:Instrumentation 年份:2014
In this paper,the design and experimental results for a novel high-stability sounding electrostatic field micro sensor are presented. By means of hermetic chip...
[期刊论文] 作者:Wen Xiaolong,Peng Chunrong,Fang Dongming,Yang Pengfei,Chen Bo,Zheng Fengjie,Xia Shanhong,, 来源:Journal of Electronics(China) 年份:2014
This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined...
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