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ZrO2 thin films were deposited by r.f. reactive unbalanced magnetron sputtering. The influence of electromagnetic coil c......
Up-scaled Teer-UDP850／4 Unbalanced Magnetron Deposition System Used for Mass-Production of CrTiAlN H
Up-scaled deposition process of Teer-UDP850/4 has been established and used for massive production of CrTiAlN hard coati......
