The imagequality evaluation in fiber-optic image bundles was addressed by the modulation transfer function (MTF). With t......

利用光刻仿真软件PROLITH,进行了掩模版空间成像的焦深(DOF)和光学临近效应的仿真.理论上分析了照明光瞳相干因子定义法:10%能量法......