Ultrathin film coating on nanoparticle via atomic layer deposition

来源 :The 9th International Conference on Thin Film Physics and Ap | 被引量 : 0次 | 上传用户:a398215555
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  Surface modification via thin film technique on micro-and nano-particles arouses great interests recently in fields such as functional ceramics, catalytic materials, and fuel cells,imparting them with unique physical, chemical, or biological properties.
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