Electrochemical Micro- and Nano- Fabrication

来源 :第八届全国微全分析系统学术会议、第三届全国微纳尺度生物分离分析学术会议暨第五届国际微化学与微系统学术会议 | 被引量 : 0次 | 上传用户:cycblb
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  Two decades have elapsed since we proposed,for the first time,confined etchant layer technique (CELT) as an electrochemical micro- and nano- fabrication method in 1992.Many progresses have been achieved and will be reported as followed: (1) The principle of CELT: The diffusion layer of electrochemical reaction can be compacted into a thickness of nanoscale through a subsequent homogeneous chemical reaction.Etchant is confined in the "compact" layer and the precision of nanofabrication is determined.(2)Fabrication of 3D nanostructures: CELT has been proved an effective method for 3D nanostructures on the surface of metals,semiconductors and insulates.The 8-phase AsGa microlens array made by CELT has a height of 180 nm for each phase.Recently,we develop an "electrochemical buckling nanofabrication" method which can perform multistage and multiscale micro & nano 3D structure.(3)Supersmooth surface polishing: Recently,we develop CELT as polishing method to produce supersmooth surface with a Ra of nanometres by replacing the 3D mask electrode with a nanometer-smoothed tool electrode.(4)Electrochemical mechanical micromachining: Based on the principles of CELT and combining with mechanical machining,we can realize the conventional cutting techniques,such as lathing,milling,planing and polishing in an electrochemical way.(5)CELT instrumentation: We designed the machine tool especially for CELT nanofabrication.For example,we develop a novel substrate levelling method based on the current feedback mode of scanning electrochemical microscopy,thus,solved the levelling and alignment between the electrochemical tool and the workpiece.
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