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本文介绍了利用激光束衍射效应形成的光斑，对大型机件进行精密平直度的测量，测量装置的读数值为 ０．００１ ｍｍ，测量相对误差为 １．４×１０－６。
In this paper, the spot formed by the laser beam diffraction effect is introduced to measure the precision flatness of large machine parts. The reading of the measuring device is 0.001 mm and the relative error of measurement is 1.4 × 10-6.