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介绍近几年来发展起来的激光光热偏转法测量固体和固体薄膜热扩散率的基本原理，并提出优化设计的测量装置，利用此装置测量了康宁玻璃基上硼硅合金薄膜的低热扩散率。
The basic principle of laser photothermal deflection method for measuring the thermal diffusivity of solid and solid thin films was introduced in this paper. An optimized measuring device was proposed to measure the low thermal diffusivity of the borosilicate thin films on Corning glass substrates.