用光子作为信息载体的光互连是硅集成电路的发展趋势之一,而硅基光互连的实现,必须发展与当前集成电路制造工艺兼容的高效硅基光源.本文概述了近年来国际上硅基光源的主要研究成果,重点介绍了我们研究组在硅量子点、硅晶体缺陷、硅基氮氧化物薄膜和硅基氧化物半导体薄膜发光材料与器件等方面的研究进展. Optical interconnection using photons as information carriers is one of the trend of silicon integrated circuits, and the realization of silicon-based optical interconnects, it is necessary to develop efficient silicon-based light sources that are compatible with the current integrated circuit manufacturing process.This paper outlines the recent development of the international community The main research results of Si-based light sources are introduced, and the research progress of our research group in silicon quantum dots, silicon crystal defects, silicon-based oxynitride films and silicon-based oxide semiconductor thin film luminescent materials and devices are mainly introduced.