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干涉测量的面形重复精度一定程度上依赖于测量框架结构的稳定性,从测量框架高稳定性的使用要求出发,对测量框架的机械结构进行了设计。在此基础上针对检测框架在随机振动下的稳定性问题,建立了检测框架的有限元模型,以实际测量的随机振动速度功率谱密度(PSD)为激励,运用ANSYS有限元分析软件中的随机振动分析模块,对该结构的随机振动响应进行了分析计算。通过分析计算得出测量框架在随机振动下的稳定性为0.5144nm,实验测量出5s内的稳定性为0.653nm,二者基本吻合。分析表明,测量框架的结构设计以及振动环境满足稳定性的指标要求。
The accuracy of surface shape measurement of interferometry depends to some extent on the stability of the measurement frame structure. Based on the high stability requirements of the measurement frame, the mechanical structure of the measurement frame is designed. On the basis of this, aiming at the stability problem of the detection frame under the random vibration, a finite element model of the detection frame is set up. Taking the actually measured random vibration velocity power spectral density (PSD) as an excitation, the finite element analysis software ANSYS Vibration analysis module, the structure of the random vibration response analysis and calculation. The stability of the measurement frame under random vibration is 0.5144nm by the analysis and calculation. The stability of the measurement frame measured within 5s is 0.653nm, which basically agrees. Analysis shows that the structural design of the measurement framework and the vibration environment to meet the stability of the index requirements.