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设计了复合基底的微机械共面波导腔结构的微机械微带传输线,研究了它的相关微尺度效应。利用修正相对介电常数法和准静态法分析了微结构金属表面的粗糙度带来的结构传输特性的变化。理论分析了复合基底的微尺度残余应力及其热敏电阻,表明它们对器件的性能影响不可忽视,需要在设计时候给予考虑。利用软件模拟结构的损耗特性,比较了不同粗糙度下的传输性能参数。这些研究方法及其结论为传输线的相关微尺度领域提供了分析基础。
The micromechanical microstrip transmission line of the composite substrate based on the micromachined coplanar waveguide structure was designed and its microscale effect was studied. The modified relative dielectric constant method and quasi-static method were used to analyze the change of the structural transmission characteristics caused by the roughness of the microstructure metal surface. Theoretical analysis of the micro-scale residual stress of the composite substrate and its thermistor, indicating that their impact on the performance of the device can not be ignored, need to be considered at the design time. Using software to simulate the loss characteristics of structures, the transmission performance parameters under different roughness are compared. These research methods and their conclusions provide the basis for the analysis of the relevant microscale fields of transmission lines.